We provide interfacing solutions for allowing connectivity of machines with the SECS/GEM standard protocol language or simply with wafer map format conversion routines.
The SECS/GEM is the semiconductor's equipment interface protocol for equipment-to-host data communication, one aspect of the industry 4.0 trend. The minimum GEM interface implies required data variables, status variables, equipment constants, and collection events. Additional machine-specific alarms, data variables, status variables, equipment constants and collection events are enhancing the value of any GEM interface. This included SECS-II messaging (E5), GEM (E30), and either the HSMS (E37) or RS-232 (E4) transport protocol standard.
Get in contact with us to learn how we can connect your non-300mm equipment with a SECS/GEM interface protocol.
The introduction of 300mm wafers, with the attending demand for solutions that enabled far greater automation within the industry 4.0 development, created a whole new set of challenges. The GEM300 standards were developed by SEMI to solve these challenges.
- Performance monitoring
- Recipe management
- Lot management
- SPC analysis
- Asset management
- Configuration management
- SECS/GEM Host Solutions
- Carrier Management
- Substrate Tracking
- Process and Control Job Management
- SEMI E4-SEMI Equipment Communications Standard 1 Message Transfer
- SEMI E5-SEMI Equipment Communications Standard 2 Message Content
- SEMI E30-Generic Model for Communication and Control of SEMI Equipment
- SEMI E37-High Speed Message Service - Single Session
- SEMI E39-Object Services Standard SEMI E40-Standard for Processing Management
- SEMI E42-Standard for SECS-II Protocol for Recipe Management Standard
- SEMI E53-Event Reporting
- SEMI E84-Specification for enhanced carrier Handoff Parallel I/O Interface
- SEMI E87-Specification for Carrier Management
- SEMI E90-Specification for Substrate Tracking
- SEMI E94-Specification for SECS-II Protocol for Control Job Management
- E116 Equipment Performance Tracking (EPT)
- E120 Specification for the Common Equipment Model (CEM)
- E142 Substrate Mapping
- G84 Specification for Strip Map Protocol
- G85 Specification for Map Data Format
A wafer map converter serves as interface translator between different machine brands. We support the following wafer map formats:
- Customer specific (e.g. UWM, E142, ALS, MSEB, IBIS-XML, COW)
- KLA Resultfile
Multiple connections of various machines or applications to various management systems
- SECS and customized MES connections
- Shopfloor status display and management
- Machine usability statistics
Get in contact with us to learn how we can connect your equipment to your shopfloor system.