Control software

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VCP-basic

Microscope inspection without wafermapping

VCP-basic refers to the control software developed for quality inspection machines with a manual microscope and a wafer handler.

Feature list excerpt:

  • SECS/GEM compatibility
  • Slot selection (manual / sample / automatic by remote interface)
  • Manual wafer inspection with joystick
  • Measurement tool compatibility
  • Inspection process logging

VCP-control

Microscope inspection with wafermapping

VCP-control refers to the control software developed for wafermapping-based quality inspection machines. Typically this solution comes with a microscope and a wafer handler.

Feature list excerpt:

  • SECS/GEM compatibility
  • Recipe management (Operator / Engineer / Service)
  • Slot selection (manual / sample / automatic by remote interface)
  • Wafermap loading with pass/fail information (first/last map)
  • Temporary map save
  • Map upload to network (Yes / No / Operator decision)
  • Move-to-chip command by map click (chip center / relative position)
  • Chip position stepping algorithms for semi-automatic inspection sequences
  • Image analysis supported AOI script assignment in .setup
  • Lot summary generation

VCP-inspect

SAM/EBIS control software with wafermapping

VCP-inspect refers to the control software developed for wafermapping-based automatic quality inspection applications. Typically this solutions connects with external hardware and analysis its acquired image data.

Feature list excerpt:

  • Wafermap loading with pass/fail information (first/last map)
  • Map upload to network (Yes / No)
  • Image analysis supported AOI script assignment in .setup
  • Lot summary generation

VCP-ink

VCP-ink refers to the control software developed for the SPA-Inker machine solution. It also is compatible to the derivates PIA-ink and Frame-Inker hardware.

Feature list excerpt:

  • Inking and re-inking of dies according to wafer map bincodes
  • Out of die center inking
  • Inker cartridge limit control (dot amount, time duration)
  • Inker cartridge type control via product setup and automatic detection
  • Inkdot inspection settings (size, position, shape)
  • Ink on pass chip detection (>50µm)
  • Individual inspection parameters for edge dies and active area

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PVA SPA Software Entwicklungs GmbH
Seifartshofstraße 12-14
96450 Coburg, Germany

Phone: +49 (0) 9561 7947-0

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