SPA wafer network

SPA wafer network (SPAwn) is a centralized host system for probe- and machine floor networking and reliable management of normalized wafer map and/or production data with connectivity to other CAM systems.

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SPAwn is designed to normalize communication in between machines in a heterogeneous park. High reliability and secure data transfer mechanisms ensure high data integrity an availability for users.

Key benefits:

  • Normalized storage of wafermaps
  • Centralized management of device data
  • Centralized management of machine setups
  • Machine independent controlmaps
  • Centralized and scheduled generation of summaries and reports
  • Import and export of production data to other systems
  • Standalone lot tracking and control
  • Connectivity to CAM systems and cell controllers
  • SECS/GEM interfacing to equipment and hosts
  • Installed base with more than 1500 machines connected

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PVA SPA Software Entwicklungs GmbH
Seifartshofstraße 12-14
96450 Coburg, Germany

Phone: +49 (0) 9561 7947-0

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