Our base systems are designed to allow a flexible integration of various inspection capabilities. The possibilities range from manually operated inspection workflows up to full automation with image analysis with specific algorithmic inspection tasks. For this purpose we provide compact handling solutions for loading wafers or frames onto various inspection systems.
Purpose of Microscope Inspection
Automatic or manual visual microscope for wafer inspection up to 12” diameter, loaded manually by hand onto a motorized xy table.
Purpose of UL200 wafer loader
The UL200 serves as a compact and fast tabletop wafer loading system for up to 8” bare wafers with customer-specific requirements.
Key benefits:
- Wafertype-specific and dynamic wafer detection for safe loading from cassette
- Automatic loading of 100-150mm or 150-200mm wafers
- Prealignment of wafer position and rotation
- Single and multi wafer handling to xy table
- Docking compatibility for manual or automatic xy tables
- ID Reading integrated within UL200
- Footprint approx. [mm] 620x630
UL200 Options:
- Illuminated top/back macro defect inspection
- Flat/notch alignment sensors for transparent wafers
- TAIKO and thin wafer handling
- SMIF wafer loading in UL200-SMIF version
- Framed wafer loading in UL200F version
- Remote interface for external control (e.g. via VCP)
- SECS/GEM compatible interface
Purpose
EBIS synchronizes visual defects located on a wafer backside to the frontside chip structure. Optimize your yield by precise automatic detection or manual marking of only the affected fail chips, and thus avoiding oversized fail area classifications!
“We make your wafers transparent”
Key benefits:
- Fast automatic loading and scanning process (up to 250 WPH)
- Full automatic macroscopic defect detection on wafer backside (defects >60µm)
- Optional visualization of complete wafer backside on the screen for defect marking or reviewing AOI results
- Transparent wafer frontside overlay on backside image during review process
- Automatic wafermap edit when backside defect is detected based on given threshold parameters