Machine interfacing

Products of SPA do support highly compatible interfaces in order to enable performant communication between equipment of the probe floor and its managing instances. PVA SPA offers powerful standalone solutions as well as smart integrated solutions for adapting the equipment in a corresponding network. Our key expertise focuses on both protocols, SECS/GEM and SECS/GEM300 for processing any wafer diameters from 2“ to 12“ as well as other i.e. tray based material fluently and serves broad band communication and reliable conversion of production data.

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SECS/GEM standard

The SECS/GEM is the semiconductor's equipment interface protocol for equipment-to-host data communication, one aspect of the industry 4.0 trend. The minimum GEM interface implies required data variables, status variables, equipment constants, and collection events. Additional machine-specific alarms, data variables, status variables, equipment constants and collection events are enhancing the value of any GEM interface. This included SECS-II messaging (E5), GEM (E30), and either the HSMS (E37) or RS-232 (E4) transport protocol standard.

Get in contact with us to learn how we can connect your non-300mm equipment with a SECS/GEM interface protocol.

SECS/GEM300

The introduction of 300mm wafers, with the attending demand for solutions that enabled far greater automation within the industry 4.0 development, created a whole new set of challenges. The GEM300 standards were developed by SEMI to solve these challenges.

Key benefits:

Performance monitoring
Recipe management
Lot management
SPC analysis
Asset management
Configuration management
SECS/GEM Host Solutions
Carrier Management
Substrate Tracking
Process and Control Job Management

We support the following GEM300 standards:

SEMI E4-SEMI Equipment Communications Standard 1 Message Transfer
SEMI E5-SEMI Equipment Communications Standard 2 Message Content
SEMI E30-Generic Model for Communication and Control of SEMI Equipment
SEMI E37-High Speed Message Service - Single Session
SEMI E39-Object Services Standard SEMI E40-Standard for Processing Management
SEMI E42-Standard for SECS-II Protocol for Recipe Management Standard

SEMI E53-Event Reporting
SEMI E84-Specification for enhanced carrier Handoff Parallel I/O Interface
SEMI E87-Specification for Carrier Management
SEMI E90-Specification for Substrate Tracking
SEMI E94-Specification for SECS-II Protocol for Control Job Management
E116 Equipment Performance Tracking (EPT)
E120 Specification for the Common Equipment Model (CEM)
E142 Substrate Mapping
G84 Specification for Strip Map Protocol
G85 Specification for Map Data Format

Data sheet PVA Data Gateway for download:

Machine interfacing via OPC/UA:

SECS SEMI standards via OPC/UA interface
Compatible with Siemens S5 and S7
GEM300 predefined data blocks (OPC/UA) : E40, E87, E87 Extended (Carrier-In-Carrier), E90, E94, E116
GEM200 Remote Control
JSON Support - Data parser to SECS/GEM
SECS solutions and parametrization for special machinery of third-party suppliers