Control software

The smooth control of machines and their process sequences is of the utmost importance to our company - especially in the increasingly fast-developing sectors of the semiconductor industry and mechanical engineering, a loss of time also equates to a loss of throughput. In order to minimize these losses, we offer comprehensive tools in the form of our control software applications, which optimize processes and offer fine-grained adjustability of all important parameters. We also see great importance in offering an authorization management that grants different user groups, such as process engineers, service technicians, or operators, authorizations tailored to their respective fields of activity.  For this reason, only the tasks, for which the respective user groups have been approved, can be carried out. Individual adaptations of the control software to the needs within your fab are optional and can support you on your way to an optimized process flow in order to achieve the best possible results and throughput.

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VCP-basic

Microscope inspection without wafermapping

VCP-basic refers to the control software developed for quality inspection machines with a manual microscope and a wafer handler.

Feature list excerpt:

  • SECS/GEM compatibility
  • Slot selection (manual / sample / automatic by remote interface)
  • Manual wafer inspection with joystick
  • Measurement tool compatibility
  • Inspection process logging

VCP-control

Microscope inspection with wafermapping

VCP-control refers to the control software developed for wafermapping-based quality inspection machines. Typically this solution comes with a microscope, a motorized xy stage with vacuum chuck a wafer handler.

Feature list excerpt:

  • SECS/GEM compatibility
  • Recipe management (Operator / Engineer / Service)
  • Slot selection (manual / sample / automatic by remote interface)
  • Wafermap loading with pass/fail information (first/last map)
  • Manual / automatic wafer alignment
  • Temporary map save
  • Map upload to network (Yes / No / Operator decision)
  • Move-to-chip command by map click (chip center / relative position)
  • Chip position stepping algorithms for semi-automatic inspection sequences
  • Image analysis supported AOI script assignment in .setup
  • Lot summary generation

VCP-inspect

SAM/EBIS control software with wafermapping

VCP-inspect refers to the control software developed for wafermapping-based automatic quality inspection applications. Typically this solutions connects with external hardware and analysis its acquired image data.

Feature list excerpt:

  • Wafermap loading with pass/fail information (first/last map)
  • Map upload to network (Yes / No)
  • Image analysis supported AOI script assignment in .setup
  • Lot summary generation

VCP-ink

VCP-ink refers to the control software developed for the SPA-Inker machine solution. It also is compatible to the derivates PIA-ink and Frame-Inker hardware.

Feature list excerpt:

  • Inking and re-inking of dies according to wafer map bincodes
  • Out of die center inking
  • Inker cartridge limit control (dot amount, time duration)
  • Inker cartridge type control via product setup and automatic detection
  • Inkdot inspection settings (size, position, shape)
  • Ink on pass chip detection (>50µm)
  • Individual inspection parameters for edge dies and active area

Immediate Contact

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PVA SPA Software Entwicklungs GmbH
Seifartshofstraße 12-14
96450 Coburg, Germany

Phone: +49 (0) 9561 7947-0

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