Software Tools

PVA SPA offers a comprehensive range of powerful software tools for the semiconductor industry, specifically designed for production, research, engineering, and development areas. Our applications enable effective visualization and flexible editing of wafer map data, as well as precise quantification and documentation of artifacts and defects. Key tools include the Wafer Map Editor, the Control Map Creator/Editor, the Measurement Tool, and the Defect ReViewer. These solutions facilitate the efficient processing and analysis of wafer data and support quality assurance. With the ability to attach measurement information directly to the relevant coordinates of a KLArf file, accurate and traceable documentation is supported.

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Wafer Map Editor

Our Wafer Map Editor allows the visual display and editing of wafer map data. The main compatible format is wql, which is expandable to any available wafer map converter.

The functions of the Wafer Map Editor include:

Display and edit of chip attributes Untested, Tested, Ink edge, Skip
Display and edit of bincodes
Display and edit of reference die coordinate(s)
Rubberband chip edit

Control Map Creator/Editor

The purpose of the Wafer Map Creator is the fast wafer map creation based on a physical wafer picture

The Wafer Map Creator implies all functions of the Wafer Map Editor. In addition it allows the loading of a real wafer picture and its transparent overlay matching to a corresponding wafer map grid creation. In summary the purpose of this tool is the fast wafer map creation based on a physical wafer picture.

Additional functions implied:

Loading of BMP and TIF image formats
Adjustable transparency of wafer image
Adjustable scaling of grid onto wafer image
Flexible edge area definition with Ink and Skip
Maximized chip image of grid coordinate

Measurement Tool

The Measurement Tool serves as metrology application for manual measurements on 2D camera images, which can be used standalone or as integrated part of a machine control software.

The functions of the Measurement Tool include:

Linear distance measurement
Area measurement (rectangles, circles, polygon)
Free text comments
Default text comments (e.g. usable for user instruction and information)
Flexible color and font size definitions
Caliper CD preset module with automatic edge detection settings

Defect ReViewer

The Defect ReViewer serves as application for displaying and editing of KLA result files. It is typically used as standalone software for viewing the defect images within the KLA result file, optionally combined with the functional scope of the measurement tool.

The functions of the Defect Reviewer include:

Loading of structured and unstructured KLA result file data
Display of defect image data
Defect selection in map display
Modification of implied error classes
Option: integrated Measurement Tool
Control Map creation from KLARF

MIDOS

Manufacturing Information Documentation and Schooling The key purpose of MIDOS is the digital documentation of defects and unclear noticeable problems during the visual inspection of semiconductor devices.

Functions implied:

Database connection (Oracle)
Different user groups with different authorities
Visualization of defect catalogue (for schooling)
Configuration of defect catalogue by administrator
Process-specific preselection of defect classes
Process-specific recording of noticeable problems
Use defect classification as process trigger (present to engineer)
Configuration of defect classes by administrator
Start MIDOS via link button in machine software (e.g. VCP)
Start MIDOS as standalone application for engineering/administration
SPECIAL: use Drive-In Mode to drive to chip defect on equipment