Purpose
PIA tabletop is a standalone system previously developed to upgrade existing prober machines (e.g. Accretech UF200A) with optical inspection applications such as the SPA-Inker functionality. One usability is the physical inking of manually loaded wafers/frames up to 200mm diameter with a subsequent fast automatic visual inspection of all inkdots and a closed-loop reink cycle (PIA-ink). Another application of potential usage is the optical inspection of semiconductor backend products with the available inspection capabilities from PVA SPA (PIA-aoi).
Purpose
Automatic visual inspection of wafers/frames up to 8”, loaded automatically by an external handler (e.g. electrical test prober) from open cassettes onto its motorized xy table. One usability is the physical inking of manually loaded wafers/frames up to 200mm diameter with a subsequent fast automatic visual inspection of all inkdots and a closed-loop reink cycle (PIA-ink). Another application of potential usage is the optical inspection of semiconductor backend products with the available inspection capabilities from PVA SPA (PIA-aoi).