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• 1. Certification  
  CertificationThe current document regarding certification according to ISO 9001:2015 is available for download here.  
• 2. About  
  Philosophy The customer is our dedication. We work together with our customer, so WE move as THEY do. The employees are our force. A friendly working environment and good human interrelationship…  
• 3. Worldwide  
  We provide sales and service support for our software and hardware solutions in many parts of the world. Highly-qualified specialists can provide consulting for useful equipment and special…  
• 4. Worldwide  
  Customer base   PVA SPA Software Entwicklungs GmbH Seifartshofstraße 12-14 96450 Coburg, Germany Contact Phone: +49 (0) 9561 7947-0 We provide sales and service support for our…  
• 5. Optical inspection - Purpose of Universal Loader Microscopes  
  Purpose of Universal Loader Microscopes Automatic or manual visual microscope inspection of up to 200mm wafer, loaded automatically by the UL200 wafer loader from cassettes onto a motorized or…  
• 6. Optical inspection - Universal Loader Microscopes (UL20x models)  
  Universal Loader Microscopes (UL20x models) Automatic wafer or frame loading  
• 7. Optical inspection  
  Enhanced Backside Inspection System (EBIS) Automatic wafer or frame loadingEbis options: Also available as standalone system or integrated in third party equipment environment.Purpose EBIS…  
• 8. Machine interfacing  
  Customized interfaces to CAM / shopfloor systems Multiple connections of various machines or applications to various management systems SECS and customized MES connections Shopfloor status…  
• 9. Machine interfacing - We support the following GEM300 standards:  
  We support the following GEM300 standards: SEMI E4-SEMI Equipment Communications Standard 1 Message Transfer SEMI E5-SEMI Equipment Communications Standard 2 Message Content SEMI E30-Generic…  
• 10. Machine interfacing - Key benefits:  
  Key benefits: Performance monitoring Recipe management Lot management SPC analysis Asset management Configuration management SECS/GEM Host Solutions Carrier Management Substrate…