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• 1. Machine interfacing - Machine interfacing via OPC/UA:  
  Machine interfacing via OPC/UA: SECS SEMI standards via OPC/UA interface Compatible with Siemens S5 and S7 GEM300 predefined data blocks (OPC/UA) : E40, E87, E87 Extended (Carrier-In-Carrier),…  
• 2. Machine interfacing - Data sheet PVA Data Gateway for download:  
  Data sheet PVA Data Gateway for download:  
• 3. Machine interfacing  
  Customized interfaces to CAM / shopfloor systems Multiple connections of various machines or applications to various management systems SECS and customized MES connections Shopfloor status…  
• 4. Optical inspection  
  LuXpector EOSOptions: Mini-Environment Adapter for Open Cassette on FOUP Integrated WaferID-Reader RFID-Reader Integrated Ionizers Overhead Transportation (OHT) Automatic end…  
• 5. Optical inspection - UL200 wafer loader  
  UL200 wafer loader Automatic wafer or frame loading  
• 6. Optical inspection - UL200 Options:  
  UL200 Options: Built-in SECS/GEM connectivity Integrated RFID / camera-based tag reading Integrated WaferID reading Special wafer sizes like 75 mm Illuminated top/back macro defect…  
• 7. Optical inspection - Benefits:  
  Benefits: Wafertype-specific and dynamic wafer detection for safe loading from cassette Automatic loading of 100-150 mm or 150-200 mm wafers Prealignment of wafer position and rotation …  
• 8. Optical inspection - Purpose of UL200 wafer loader  
  Purpose of UL200 wafer loader The UL200 is a compact table system with a small footprint for fast automatic loading of wafers with a diameter of up to 200 mm onto a microscope either provided by us…  
• 9. Optical inspection - Enhanced Backside Inspection System  
  Enhanced Backside Inspection System The LuXpector EBIS (Enhanced Backside Inspection System) uses two high-resolution CIS scan lines to capture images of the front- and backside of wafers…  
• 10. Optical inspection - LuXpector EBIS  
  LuXpector EBIS